The PWS-HE Series full-automatic waveguide coupling platform combines dual-side 6-axis motorized stages, vision-guided alignment, temperature-controlled chip stage, UV curing and intelligent software control—delivering nanometer-level precision and high throughput for silicon. The PWS-HE Series full-automatic waveguide coupling platform combines dual-side 6-axis motorized stages, vision-guided alignment, temperature-controlled chip stage, UV curing and intelligent software control—delivering nanometer-level precision and high throughput for silicon. This paper has proposed an automatic precise alignment coupling algorithm of planar optical waveguide devices based on polynomial fitting, and the experiment shows that for 1 8 planar optical waveguide splitter, the time it takes for alignment is within 2. 5 min and for 1 16 planar optical waveguide. The automatic waveguide coupling system includes 13 axis highly-precise motorized stage and automatic test software, supporting waveguide device alignment and UV bonding. It is easy integrated. The Form. We have developed four standard versions of Form. ai planar waveguide coupling systems for Spliter. The invention discloses a planar waveguide automatic coupling alignment method based on three-dimensional reconstruction, which extracts key characteristics of a planar waveguide chip and an optical fiber array through the three-dimensional reconstruction, calculates the distance and angle between.
